$ 2,707.16
Details
A precise SEM calibration specimen of more than 1.6 million 1 micron gold squares on silicon that forms a 4-fold checkerboard pattern in an area of 5 mm square. The smallest metric checkerboard has a size of 10 x 10 microns. Such checkerboards form larger metric checkerboards of 100 x 100 micron. These again form checkerboards of 1 mm square. Finally, the 1 mm squares are arranged in the same manner covering a field of 5 mm square. The edges of the empty corners in 0.1 and 1 mm checkerboards are additionally marked. The surrounding frame is 10� wide and has an outer side length of 5.04 mm. The pattern was directly written by e-beam lithography using the new ZBA 31/32 from JENOPTIK. Ideal for calibration of SEM magnification in all ranges between 20x and 50,000x.
